etching paper

基本解释

This paper designs an etching system with constant temperature for etching process in MEMS manufacture.
本文設計了一個恒溫腐蝕系統，用於微機械加工制作中的腐蝕工藝。
Based on electrochemical etching principles, the paper fabricated the micrometer scale wire electrodes used in WEMM.
本文基於電化學腐蝕原理，制備微細電化學線切割加工中使用的微米尺度線電極。
A technique for the fabrication of silicon cone cathode array by using anisotropic and isotropic etching has been reported in this paper.
詳細研究了利用矽的各曏異性腐蝕、各曏同性腐蝕制備矽錐隂極陣列的工藝。