batch etching

基本解释

Making method of high deep-width rate, batch production of planar windings with LIGA process and silicon deep etching process is researched .
較深入地研究了以LIGA工藝、矽深刻蝕工藝爲主的平麪繞阻的高深寬比、批量化制作方法。
Making method of high deep-width rate, batch production of planar windings with LIGA process and silicon deep etching process is researched in the thesis.
較深入地研究了以LIGA工藝、矽深刻蝕工藝爲主的平麪繞阻的高深寬比、批量化制作方法。
In addition, by utilizing the wet type etching in the manufacture process, the batch amplification can be increased, and the cost of the manufacture process is decreased.
另外，在制造工藝中使用溼式蝕刻也可增加批次放大，降低制造工藝的成本。
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